Transistor having a protruded drain

ABSTRACT

A field effect transistor includes a gate that is formed in a channel region of an active region defined on a substrate. A source is formed at a first surface portion of the active region that is adjacently disposed at a first side face of the gate. A drain is formed at a second surface portion of the active region that is opposite to the first surface portion with respect to the gate. The drain has a protruded portion that is protruded from a surface portion of the substrate.

CROSS REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. application Ser. No.10/952,105, filed on Sep. 28, 2004 now U.S. Pat. No. 7,193,271, whichrelies for priority upon Korean Patent Application No. 10-2003-0067244,filed on Sep. 29, 2003, the contents of which are herein incorporated byreference in their entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a field effect transistor and a methodof manufacturing the transistor. More particularly, the presentinvention relates to a field effect transistor having a drain that isprotruded from a substrate, and a method for forming the transistor.

2. Description of the Related Art

In general, semiconductor transistors may be categorized as bipolarjunction transistors (BJT) or field effect transistors (FET).

The BJT has electrons and holes as charge carriers. The electron and thehole carry charges in a single transistor. Thus, regardless of whetherthe transistor is an NPN transistor or a PNP transistor, the chargecarrier in the BJT is the electron and the hole.

On the contrary, the FET has only a single charge carrier. The chargecarrier is an electron in an N type FET and is a hole in a P type FET.The FET can be a metal-oxide-semiconductor FET (MOSFET) that is widelyemployed in semiconductor devices.

The MOSFET can be a complementary MOS (CMOS). The CMOS is used in mostdigital logic circuits. The CMOS has a low operation voltage.Accordingly, although a low voltage is applied to the CMOS, the CMOS maybe normally operated. However, when a high voltage is applied to theCMOS, the CMOS may be abnormally operated. As a result, since the CMOShas a low breakdown voltage, the CMOS to which the high voltage isapplied may malfunction.

Generally, a high-voltage transistor has a rectifying function and aswitching function. To evaluate the functions of the high-voltagetransistor, a breakdown voltage and a resistance in the high-voltagetransistor are considered as important factors.

The operation voltage of the transistor is determined in accordance withthe breakdown voltage. A high breakdown voltage is required forperforming the rectifying and the switching functions of thehigh-voltage transistor when a high voltage is applied to thehigh-voltage transistor.

A breakdown generated in a semiconductor device is mainly an avalanchebreakdown. The avalanche breakdown is caused by an electron-hole pair(EHP). The EHP is generated due to a collision of the charge carrierthat receives energy generated by a strong electric field with amolecule for forming a crystalline structure of the semiconductordevice. The strong electric field is applied to a depletion region. Whenthe electron or the hole as the charge carrier moves in the depletionregion, the electric field applied to the depletion region provideskinetic energy to the charge carrier so that the charge carrier collideswith the molecule, thereby losing the kinetic energy. The EHP is thengenerated from the molecule. This mechanism continuously occurs togenerate the avalanche breakdown in the semiconductor device. Thus, whenthe breakdown is generated, a great amount of current flows through achannel region of the transistor. As a result, the amount of the currentvaries remarkably in accordance with a tiny increase of voltage so thatthe semiconductor device may be uncontrollable.

Another breakdown is a Zener breakdown caused by tunneling. The Zenerbreakdown is generated in a PN junction doped with impurities at ahigh-concentration. A conduction band of an N type semiconductor deviceand a valence band of a P type semiconductor device overlap with eachother, thereby generating the Zener breakdown. When a concentrationprofile of the PN junction quickly increases, the Zener breakdown isalso generated. Accordingly, when the semiconductor device is doped withimpurities at a high-concentration, Zener breakdown is generated beforegenerating the avalanche breakdown. To prevent the occurrence of theZener breakdown that is generated under a voltage that is relatively lowcompared to that causing the avalanche breakdown, a region doped withimpurities at a low-concentration is required in source/drain regions ofthe transistor.

In order that the transistor may function as a switch, the channel has alow resistance when the transistor is turned-on, and the channel has ahigh resistance when the transistor is turned-off. In an idealtransistor, the resistance of the channel is about zero when thetransistor is turned-on, and is infinite when the transistor isturned-off. However, in a real transistor, the channel has a resistancein the turned-on or the turned-off state. In particular, thenon-infinite resistance of the transistor in the turned-off state causesa leakage current of the transistor. Further, a high resistance of thechannel decreases a transmission efficiency of a signal through thechannel.

Accordingly, the transistor has a high breakdown voltage and a lowresistance to be operated at a high voltage. However, the resistance andthe breakdown voltage have a trade-off relation that characteristics ofthe resistance are degraded when characteristics of the breakdownvoltage are improved, and vice versa.

Many transistors are suggested for improving the characteristics of theresistance and the breakdown voltage.

A conventional transistor is formed so as to have a lightly doped drain(LDD) structure. Source/drain regions doped with impurities at alow-concentration are formed to surround source/drain regions doped withimpurities at a high-concentration, respectively, to provide a highbreakdown voltage to the transistor. The source region doped withimpurities at a low-concentration is extended under a gate oxide layer.The drain region doped with impurities at a low-concentration isextended under a portion of the gate oxide layer that is disposedadjacent to the drain region doped impurities at a high-concentrationimpurity. A length of a channel region is shortened in the structuredescribed above, thereby reducing the resistance of the transistor.Further, the source/drain regions doped with impurities at alow-concentration, which intersect each other at both sides of the gateoxide layer, prevent a hot-carrier injection generated in the channelregion adjacent to the drain region doped with impurities at ahigh-concentration. Particularly, the source/drain regions doped withimpurities at a low-concentration increase a width between thesource/drain regions doped with impurities at a high-concentration sothat the transistor has a high breakdown voltage.

Another conventional transistor has a lateral double-diffused MOS(LDMOS). The LDMOS has improved resistance and breakdown voltagecharacteristics. The LDMOS is also normally operated by an input signalhaving a high frequency. Further, since the LDMOS may be fabricated byprocesses for manufacturing standard CMOS and by additional processes,the LDMOS is employed in conventional process lines for manufacturingthe standard CMOS. The LDMOS has a very short channel length so that thetransistor has improved high frequency and resistance characteristics.To improve the breakdown voltage characteristic, an interval between thesource region and the drain region that are doped with impurities at ahigh-concentration is widened. Thus, the drain region is needed to havea wide lightly doped region. A structural feature of the LDMOS is thatthe transistor has a channel region separated from a drift region,whereas other transistors have the channel and drift regions into onecombined region. The drift region for maintaining the high voltage thatis applied to the drain region is doped with impurities at alow-concentration to a great extent. The channel region through whichthe charge carrier passes has a very short length for suppressing theoccurrence of the EHP. Additionally, the LDMOS has a base and a basecontact for capturing an electron or a hole that is generated by movingthe charge carrier.

The above-mentioned conventional transistors are required to have thewide low-concentration impurity region so that the area occupied bytransistors in a semiconductor device is enlarged. Numbers ofsemiconductor devices on a wafer, that is, a net die, are reduced.Further, a photoresist pattern may be mis-aligned in an ion implantationprocess for forming the source/drain regions so that characteristics ofa semiconductor device may be greatly changed. As a result, guaranteeinga process margin may be difficult.

SUMMARY OF THE INVENTION

The present invention provides a field effect transistor having a highbreakdown voltage.

The present invention also provides an LDMOS transistor having a highbreakdown voltage.

The present invention also provides a method of manufacturing a fieldeffect transistor that has a high breakdown voltage.

The present invention also provides a method of manufacturing an LDMOStransistor that has a high breakdown voltage.

A field effect transistor in accordance with one aspect of the presentinvention includes a gate that is formed in a channel region of anactive region defined on a substrate. A source is formed at a firstsurface portion of the active region that is adjacently disposed at afirst side face of the gate. A drain is formed at a second surfaceportion of the active region that is positioned adjacent to a secondside face of the gate opposite to the first side face. That is, thesecond surface portion is opposite to the first surface portion withrespect to the gate. The drain has a protruded portion that is protrudedfrom a surface portion of the substrate.

An LDMOS transistor in accordance with another aspect of the presentinvention includes a gate that is formed on a channel region of anactive region defined on a substrate. A source is formed at a firstsurface portion of the active region that is positioned adjacent to afirst side face of the gate. A drain is formed at a second surfaceportion of the active region that is positioned adjacent to a secondside face of the gate opposite to the first side face. That is, thesecond surface portion is opposite to the first surface portion withrespect to the gate. The drain has a protruded portion that is protrudedfrom a surface portion of the substrate. A base makes contact with thedrain and surrounds the channel region and the source.

In a method of manufacturing a field effect transistor in accordancewith still another aspect of the present invention, a source is formedat a first surface portion of an active region that is defined on asubstrate. A drain, having a protruded portion that is protruded from asurface portion of the substrate, is formed at a second surface portionof the active region that is opposite to the first surface portion ofthe active region, i.e., opposite to the source. A gate is formed on achannel region between the source and the drain.

In a method of manufacturing an LDMOS transistor in accordance withstill another aspect of the present invention, an insulation layer isformed on a substrate to define an active region on the substrate.Lightly doped source/drain regions are formed at surface portions of theactive region, the lightly doped source/drain regions being spaced apartfrom each other. A gate is formed on the active region between thelightly doped source/drain regions, the gate having a width greater thanthe distance at which the lightly doped source/drain regions are spacedapart. A protruded portion doped with impurities at a high-concentrationis formed on the lightly doped drain region between the gate and theinsulating layer. A heavily doped source region is formed at a surfaceportion of the lightly doped source region, and a heavily doped drainregion is formed at a surface portion of the protruded portion.

In a method of manufacturing an LDMOS transistor in accordance withstill another aspect of the present invention, a base is formed at afirst surface portion of an active region that is defined on asubstrate. A source is formed on the base. A drain having a protrudedportion that is protruded from a surface portion of the substrate isformed at a second surface portion of the active region that is oppositeto the first surface portion, i.e., opposite to the source. A gate isformed on a channel region between the source and the drain.

In a method of manufacturing an LDMOS transistor in accordance withstill another aspect of the present invention, a base is formed at afirst surface portion of an active region that is defined on asubstrate. Insulation layers are formed at surface portions of the baseand the substrate, respectively. A lightly doped drain region is formedat a surface portion of the active region. A gate is formed on thesubstrate adjacent to the lightly doped drain region. A protrudedportion doped with impurities at a high-concentration is formed on thelightly doped drain region. A heavily doped source region is formed at asurface portion of the lightly doped source region, and a heavily dopeddrain region is formed at a surface portion of the protruded portion. Abase contact doped with impurities at a high-concentration is formedbetween the gate and the heavily doped source region.

According to the present invention, the transistor has a reduced area.Also, a breakdown voltage is controllable without degrading a resistancecharacteristic. Further, an ion implantation process for forming a draindoped with impurities at a high-concentration is readily carried out.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other features and advantages of the invention will beapparent from the more particular description of an embodiment of theinvention, as illustrated in the accompanying drawing. The drawing isnot necessarily to scale, emphasis instead being placed uponillustrating the principles of the invention.

FIG. 1 is cross sectional view illustrating a field effect transistor inaccordance with a first embodiment of the present invention.

FIGS. 2 to 7 are cross sectional views illustrating a method ofmanufacturing the field effect transistor in FIG. 1.

FIG. 8 is a cross sectional view illustrating an LDMOS transistor inaccordance with a second embodiment of the present invention.

FIGS. 9 to 14 are cross sectional views illustrating a method ofmanufacturing the LDMOS transistor in FIG. 8.

DESCRIPTION OF THE INVENTION

Hereinafter, transistors and method for forming the transistors inaccordance with embodiments of the present invention are illustrated indetail with reference to the accompanying drawings.

Embodiment 1

FIG. 1 is cross sectional view illustrating a field effect transistor inaccordance with a first embodiment of the present invention. In FIG. 1,wirings of a transistor are omitted.

Referring to FIG. 1, an insulation layer 102 for defining an activeregion is positioned at a surface portion of a substrate 100. Theinsulation layer 102 may be formed by a local oxidation of silicon(LOCOS) process or a trench isolation process. When the insulation layer102 is formed by the trench isolation process, an electric field may beconcentrated on a bottom corner of the insulation layer 102 so that aninsulation characteristic between devices is degraded. Thus, theinsulation layer 102 is preferably formed by the LOCOS process.

A field effect transistor (FET) is positioned on the active region thatis defined by the insulating layer 102. A gate is located at a centralportion of the transistor. The gate includes a dielectric layer pattern108 and a conductive layer pattern 110. The gate may include a spacer112 to protect the dielectric layer pattern 108 and the conductive layerpattern 110 in a subsequent etching process or an ion implantationprocess.

A source is positioned between a first side face of the gate and theinsulation layer 102. The source includes a highly or heavily dopedsource region 120 and a lightly doped source region 104. The lightlydoped source region 104 extends from the insulation layer 102 towards alower portion of the dielectric layer pattern 108. That is, the lightlydoped source region 104 and the dielectric layer pattern 108 arepartially overlapped with each other. The heavily doped source region120 is formed in the lightly doped source region 104 without beingoverlapped with the dielectric layer pattern 108. The lightly dopedsource region 104 preferably surrounds the heavily doped source region120. Accordingly, the lightly doped source region 104 has a first depthfrom the surface of the substrate 100. The heavily doped source region120 has a second depth less than the first depth from the surface of thesubstrate 100.

A drain is positioned between a second side face of the gate opposite tothe first side face and the insulation layer 102. Accordingly, the drainis disposed opposite to the source with respect to the gate. The drainincludes a lightly doped drain region 106, a protruded portion 116 dopedwith impurities at a high-concentration, and a heavily doped drainregion 118 formed at a surface portion of the protruded portion 116. Thelightly doped drain region 106 is formed at the surface portion of thesubstrate 100 that is disposed adjacent to the second side face of thegate. The lightly doped drain region 106 is partially overlapped withthe dielectric layer pattern 108. The lightly doped drain region 106 hasa third depth from the surface of the substrate 100. The protrudedportion 116 is positioned between a gate spacer formed on the secondface of the gate and the insulation layer 102. A height of the protrudedportion 116 may vary in accordance with an operation voltage of thetransistor. The height of the protruded portion 116 may be higher thanthat of the gate. Alternatively, the height of the protruded portion 116may be substantially equal to or no more than that of the gate. Theheavily doped drain region 118 is positioned on the protruded portion116. An area of the transistor is remarkably reduced due to the lightlydoped drain region 106 and the protruded portion 116.

FIGS. 2 to 7 are cross sectional views illustrating a method for formingthe field effect transistor in FIG. 1.

Referring to FIG. 2, the insulation layer 102 is formed on the substrate100 by a LOCOS process or a trench process. Preferably, the insulationlayer 102 is formed by the LOCOS process.

The insulation layer 102 may be formed by the following method. A padoxide layer (not shown) and a nitride layer (not shown) are subsequentlyformed on the substrate 100. A photoresist film (not shown) is formed onthe nitride layer. The photoresist film is patterned to form aphotoresist pattern (not shown). The nitride layer is etched using thephotoresist pattern as an etching mask to partially expose the pad oxidelayer. The exposed pad oxide layer is oxidized to transform into apartial oxide layer. The nitride layer and the pad oxide layer areremoved to obtain the insulation layer 102 corresponding to the partialoxide layer. The insulation layer 102 defines an active region on thesubstrate on which the transistor is formed.

Referring to FIG. 3, a photoresist film (not shown) is formed on thesubstrate 100 and the insulation layer 102. The photoresist film ispatterned to form a photoresist pattern (not shown). Impurities areimplanted into the surface portions of the active region at a lowconcentration to form the lightly doped source region 104 and thelightly doped drain region 106 that is spaced apart from the lightlydoped source region 104 by a predetermined distance. A diffusion processmay be further performed after implanting the impurities. Alternatively,the source/drain regions may be formed prior to formation of theinsulation layer 102.

Referring to FIG. 4, a gate is formed on the surface portion of thesubstrate 100 between the lightly doped source region 104 and thelightly doped drain region 106. To form the gate, the dielectric layer(not shown) including oxide is formed on the substrate 100. Theconductive layer (not shown) including polysilicon is formed on thedielectric layer. A photoresist film (not shown) is formed on theconductive layer. The photoresist film is patterned to form aphotoresist pattern (not shown). The conductive layer and the dielectriclayer are etched using the photoresist pattern as an etching mask toform the gate including the dielectric layer pattern 108 and theconductive layer pattern 110. The dielectric layer pattern 108 and theconductive layer pattern 110 have a width greater than the distancebetween the lightly doped source/drain regions 104 and 106. Thus, thedielectric layer pattern 108 is overlapped with the lightly dopedsource/drain regions 104 and 106. Additionally, the gate may include aspacer 112 that is formed on a sidewall of the dielectric layer pattern108 and the conductive layer pattern 110. A nitride layer (not shown) isformed on the gate and the substrate 100. The nitride layer isetched-back to form the spacer 112.

Referring to FIG. 5, a blocking layer (not shown) including oxide isformed on the gate and the substrate 100. A photoresist film (not shown)is formed on the blocking layer. The photoresist film is patterned toform a photoresist pattern (not shown) exposing the lightly doped drainregion 106. The blocking layer is partially etched using the photoresistpattern as an etching mask to form a blocking layer pattern 114 exposingthe lightly doped drain region 106 and the spacer 112. Here, in FIG. 5,the blocking layer pattern 114 exposes the spacer 112 and the lightlydoped drain region 106. Alternatively, the blocking layer pattern 114may expose only the lightly doped drain region 106 or the lightly dopeddrain region 106 and a portion of the insulation layer 102. Also, theblocking layer pattern 114 may expose the spacer 112, the lightly dopeddrain region 106 and a portion of the insulation layer 102. Accordingly,a margin in a photolithography process for forming the photoresistpattern is guaranteed.

Referring to FIG. 6, a gas including a material that is substantiallyidentical to that of the lightly doped drain region 106 is applied tothe lightly doped drain region 106 to epitaxially grow the protrudedportion 116 from the lightly doped drain region 106. Here, the blockinglayer pattern 114 prevents the epitaxial growth of layers that aredisposed under the blocking layer pattern 114. Accordingly, theprotruded portion 116 is formed only on the exposed lightly doped drainregion 106. In FIG. 6, the protruded portion 116 has a height less thanthat of the gate. Alternatively, the protruded portion 116 may have aheight substantially equal to or no more than that of the gate inaccordance with the operation voltage of the transistor. The protrudedportion 116 is doped with impurities at a low-concentration. Theprotruded portion 116 also has a conductivity type substantiallyidentical to that of the lightly doped source/drain regions 104 and 106.

Referring to FIG. 7, impurities are implanted into the protruded portion116 at a high concentration to form a heavily doped drain region 118.The heavily doped drain region 118 is formed at a surface portion of theprotruded portion 116. Simultaneously, the heavily doped source region120 is formed together with the heavily doped drain region 118 byimplanting the impurities at a high concentration. Since the protrudedportion 116 is positioned on the lightly doped drain region 106 and theheavily doped drain region 118 is positioned on the protruded portion116, an effective length between the heavily doped source region 120 andthe heavily doped drain region 118 is a sum of a horizontal length fromthe heavily doped source region 120 to the lightly doped drain region106 and a vertical length from the lightly doped drain region 106 to theheavily doped drain region 118. Accordingly, the distance between thesource and the drain is elongated so that the transistor having a highbreakdown voltage has a narrow area.

In accordance with the invention, the transistor may be an N typetransistor or a P type transistor. When the transistor is an N typetransistor, the source/drain regions are an N type. When the transistoris a P type transistor, the source/drain regions are a P type.Additionally, the transistor may include a well (not shown) thatincludes the source, the drain and the gate and also is distinguishedfrom a bulk portion of the substrate.

Embodiment 2

FIG. 8 is cross sectional view illustrating an LDMOS transistor inaccordance with a second embodiment of the present invention.

Referring to FIG. 8, an insulation layer 102 for defining an activeregion is positioned at a surface portion of a substrate 100. Theinsulation layer 102 may be formed by a local oxidation of silicon(LOCOS) process or a trench isolation process. When the insulation layer102 is formed by the trench isolation process, an electric field may beconcentrated on a bottom corner of the insulation layer 102 so that aninsulation characteristic between devices is degraded. Thus, theinsulation layer 102 is preferably formed by the LOCOS process.

A field effect transistor (FET) is positioned on the active region thatis defined by the insulating layer 102. A gate is located at a centralportion of the transistor. The gate includes a dielectric layer pattern108 and a conductive layer pattern 110. The gate may include a spacer112 to protect the dielectric layer pattern 108 and the conductive layerpattern 110 in a subsequent etching process or an ion implantationprocess.

A source is positioned between a first side face of the gate and theinsulation layer 102. The source includes a heavily doped source region120, a lightly doped source region 104 and a base contact 122. Thelightly doped source region 104 extends from the insulation layer 102towards a lower portion of the dielectric layer pattern 108. Thus, thelightly doped source region 104 and the dielectric layer pattern 108 arepartially overlapped with each other. The heavily doped source region120 is formed in the lightly doped source region 104 without beingoverlapped with the dielectric layer pattern 108. The lightly dopedsource region 104 preferably surrounds the heavily doped source region120. Accordingly, the lightly doped source region 104 has a first depthfrom the surface of the substrate 100. The heavily doped source region120 has a second depth less than the first depth from the surface of thesubstrate 100. The base contact 122 makes contact with the lightly dopedsource region 104. The base contact 122 is also electrically connectedto the heavily doped source region 120. The base contact 122 has aconductivity type opposite to that of the low-concentration and heavilydoped source regions 104 and 120. When the low-concentration and heavilydoped source regions 104 and 120 are N type, the base contact 122 is Ptype, and vice versa.

A base 101 is positioned under a channel region beneath the gate and thesource. The base 101 has a conductivity type substantially identical tothat of the base contact 122.

A drain is positioned between a second side face of the gate opposite tothe first side face and the insulation layer 102. Accordingly, the drainis disposed opposite to the source with respect to the gate. The drainincludes a lightly doped drain region 106, a protruded portion 116 dopedwith impurities at a high-concentration, and a heavily doped drainregion 118 formed at a surface portion of the protruded portion 116. Thelightly doped drain region 106 is formed at the surface portion of thesubstrate 100 that is disposed adjacent to the second side face of thegate. The lightly doped drain region 106 is partially overlapped withthe dielectric layer pattern 108. The lightly doped drain region 106 hasa third depth from the surface of the substrate 100. The protrudedportion 116 is positioned between a gate spacer formed on the secondface of the gate and the insulation layer 102. A height of the protrudedportion 116 may vary in accordance with an operation voltage of thetransistor. The height of the protruded portion 116 may be higher thanthat of the gate. Alternatively, the height of the protruded portion 116may be substantially equal to or no more than that of the gate. Theheavily doped drain region 118 is positioned on the protruded portion116. An area of the transistor is remarkably reduced due to the lightlydoped drain region 106 and the protruded portion 116.

Additionally, the transistor may include a well (not shown) thatincludes the base 101 and the lightly doped drain region 106. The wellhas a conductivity type opposite to that of the base 101 andsubstantially identical to that of the lightly doped drain region 106.

FIGS. 9 to 14 are cross sectional views illustrating a method forforming the LDMOS transistor in FIG. 8.

Referring to FIG. 9, the base 101 is formed at a surface portion of thesubstrate 100 by an ion implantation process or ionimplantation/diffusion processes. In particular, a photoresist film (notshown) is formed on the substrate 100. The photoresist film is patternedto form a photoresist pattern (not shown). Impurities are implanted intothe substrate using the photoresist pattern as an ion implanting mask toform the base 101. Additionally, the impurities in the base 101 may bediffused for controlling a depth and a width of the base 101.

Referring to FIG. 10, the insulation layer 102 is formed at surfaceportions of the base 101 and the substrate 100 by a LOCOS process or atrench isolation process. Preferably, the insulation layer 102 is formedby the LOCOS process.

The insulation layer 102 may be formed by a following method. A padoxide layer (not shown) and a nitride layer (not shown) are subsequentlyformed on the substrate 100. A photoresist film (not shown) is formed onthe nitride layer. The photoresist film is patterned to form aphotoresist pattern (not shown). The nitride layer is etched using thephotoresist pattern as an etching mask to partially expose the pad oxidelayer. The exposed pad oxide layer is oxidized to become a partial oxidelayer. The nitride layer and the pad oxide layer are removed to obtainthe insulation layer 102 corresponding to the partial oxide layer. Theinsulation layer 102 defines an active region on the substrate on whichthe transistor is formed.

Referring to FIG. 11, a photoresist film (not shown) is formed on thesubstrate 100 and the insulation layer 102. The photoresist film ispatterned to form a photoresist pattern (not shown). Impurities areimplanted into the surface portions of the active region at a lowconcentration to form the lightly doped source region 104 and thelightly doped drain region 106 that is spaced apart from the lightlydoped source region 104 by a predetermined distance. A diffusion processmay be further performed after implanting the impurities. Alternatively,the source/drain regions may be formed before forming the insulationlayer 102.

Referring to FIG. 12, a gate is formed on the surface portion of thesubstrate 100 between the lightly doped source region 104 and thelightly doped drain region 106. To form the gate, the dielectric layer(not shown) including oxide is formed on the substrate 100. Theconductive layer (not shown) including polysilicon is formed on thedielectric layer. A photoresist film (not shown) is formed on theconductive layer. The photoresist film is patterned to form aphotoresist pattern (not shown). The conductive layer and the dielectriclayer are etched using the photoresist pattern as an etching mask toform the gate including the dielectric layer pattern 108 and theconductive layer pattern 110. The dielectric layer pattern 108 and theconductive layer pattern 110 have a width greater than the distancebetween the lightly doped source/drain regions 104 and 106. Thus, thedielectric layer pattern 108 is overlapped with the lightly dopedsource/drain regions 104 and 106. Additionally, the gate may include aspacer 112 that is formed on a sidewall of the dielectric layer pattern108 and the conductive layer pattern 110. A nitride layer (not shown) isformed on the gate and the substrate 100. The nitride layer isetched-back to form the spacer 112.

Referring to FIG. 13, a blocking layer (not shown) including oxide isformed on the gate and the substrate 100. A photoresist film (not shown)is formed on the blocking layer. The photoresist film is patterned toform a photoresist pattern (not shown) exposing the lightly doped drainregion 106. The blocking layer is partially etched using the photoresistpattern as an etching mask to form a blocking layer pattern 114 exposingthe lightly doped drain region 106 and the spacer 112. Here, in FIG. 13,the blocking layer pattern 114 exposes the spacer 112 and the lightlydoped drain region 106. Alternatively, the blocking layer pattern 114may expose only the lightly doped drain region 106 or the lightly dopeddrain region 106 and a portion of the insulation layer 102. Also, theblocking layer pattern 114 may expose the spacer 112, the lightly dopeddrain region 106 and the portion of the insulation layer 102.Accordingly, a margin in a photolithography process for forming thephotoresist pattern is guaranteed.

Referring to FIG. 14, a gas including a material that is substantiallyidentical to that of the lightly doped drain region 106 is applied tothe lightly doped drain region 106 to epitaxially grow the protrudedportion 116 from the lightly doped drain region 106. Here, the blockinglayer pattern 114 prevents the epitaxial growth of layers that aredisposed under the blocking layer pattern 114. Accordingly, theprotruded portion 116 is formed only on the exposed lightly doped drainregion 106. In FIG. 14, the protruded portion 116 has a height less thanthat of the gate. Alternatively, the protruded portion 116 may have aheight substantially equal to or no more than that of the gate inaccordance with the operation voltage of the transistor. The protrudedportion 116 is doped with impurities at a low-concentration. Also, theprotruded portion 116 has a conductivity type substantially identical tothat of the lightly doped source/drain regions 104 and 106.

High-concentration impurities are implanted into the protruded portion116 to form a heavily doped drain region 118. The heavily doped drainregion 118 is formed at a surface portion of the protruded portion 116.Simultaneously, the heavily doped source region 120 is formed togetherwith the heavily doped drain region 118 by implanting thehigh-concentration impurities. Since the protruded portion 116 ispositioned on the lightly doped drain region 106 and the heavily dopeddrain region 118 is positioned on the protruded portion 116, aneffective length between the heavily doped source region 120 and theheavily doped drain region 118 is a sum of a horizontal length from theheavily doped source region 120 to the lightly doped drain region 106and a vertical length from the lightly doped drain region 106 to theheavily doped drain region 118. Accordingly, the distance between thesource and the drain is elongated so that the transistor having a highbreakdown voltage has a narrow area.

A base contact 122 doped with impurities at a high-concentration isformed between the lightly doped source region 104 and the insulationlayer 102. The base contact 122 has a conductivity type opposite to thatof the lightly doped source region 104 and the heavily doped sourceregion 120. Accordingly, when the lightly doped source region 104 andthe heavily doped source region 120 are an N type, the base contact 122is a P type substantially identical to that of the base 101. The basecontact 122 is formed by an ion implantation process. The base contact122 also makes contact with the lightly doped source region 104. Thus,the base contact 122 is electrically connected to the heavily dopedsource region 120. Alternatively, the base contact 122 may be formedbefore forming the heavily doped source region 120 and the heavily dopeddrain region 118. The base contact 122 captures minority carriers amongthe EHPs that are generated from the base 101 defining the channelregion.

An effective length of the LDMOS transistor is the distance between thelightly doped source region 104 and the lightly doped drain region 106so that the resistance of the LDMOS transistor is reduced. Further, theeffective length extends by the protruded portion 116 so that thebreakdown voltage increases.

In particular, the protruded portion 116 is positioned on the lightlydoped drain region 106, and the heavily doped drain region 118 ispositioned on the protruded portion 116. Accordingly, the effectivelength between the heavily doped source region 120 and the heavily dopeddrain region 118 is the sum of a horizontal length from the heavilydoped source region 120 to the lightly doped drain region 106 and avertical length from the lightly doped drain region 106 to the heavilydoped drain region 118. Accordingly, the distance between the source andthe drain is elongated so that the transistor having a high breakdownvoltage has a narrow area

The transistor may be an N type transistor or a P type transistor in thepresent embodiment. When the transistor is the N type transistor, thesource/drain regions are N type, and the base and the base contact are Ptype. When the transistor is the P type transistor, the source/drainregions are P type, and the base and the base contact are N type.Additionally, the transistor may include a well (not shown) thatincludes the source, the drain, the gate, and the base, and is alsodistinguished from a bulk portion of the substrate. The well has aconductivity type substantially identical to that of the drain regionsthough concentrations of the well and the drain regions are differentfrom each other.

According to the present invention, the FET and the LDMOS transistorshaving a small area are manufactured without degrading characteristicsof the resistance and the breakdown voltage. Further, a sufficientprocess margin in forming the heavily doped drain region is guaranteed.The drift region in the heavily doped drain region that is maintained ina high voltage is readily controlled. As a result, the transistors arereadily manufactured in accordance with the operation voltage of thetransistors.

While this invention has been particularly shown and described withreference to preferred embodiments thereof, it will be understood bythose skilled in the art that various changes in form and details may bemade therein without departing from the spirit and scope of-theinvention as defined by the appended claims.

1. A lateral double diffused metal-oxide-semiconductor (LDMOS)transistor, comprising: a gate formed on a channel region of an activeregion, the active region defined at a surface portion of a substrate; asource formed at a first surface portion of the active region that ispositioned adjacent to a first side face of the gate; a drain formed ata second surface portion of the active region that is positionedadjacent to a second side face of the gate opposite to the first sideface, the drain having a protruded portion that is protruded from asurface portion of the substrate; and a base contacting the drain andsurrounding the channel region and the source.
 2. The transistor ofclaim 1, wherein the gate comprises: a dielectric layer pattern formedon the channel region; and a conductive layer pattern formed on thedielectric layer pattern.
 3. The transistor of claim 2, wherein thesource comprises a heavily doped source region and a base contactelectrically connected to the heavily doped source region, and the basecontact is formed at a surface portion of the active region that ispositioned farther than the heavily doped source region with respect tothe gate.
 4. The transistor of claim 3, wherein the base contactcomprises a conductivity type that is different from that of the heavilydoped source region.
 5. The transistor of claim 4, wherein the sourcefurther comprises a lightly doped source region having a portion that ispositioned under the dielectric layer, and surrounding the heavily dopedsource region.
 6. The transistor of claim 2, wherein the drain comprisesa lightly doped drain region, the protruded portion being positioned onthe lightly doped drain region.
 7. The transistor of claim 6, wherein aheavily doped drain region is formed at a surface portion of theprotruded portion.